SiAl Sputtering Target, High Quality, Monolithic, Rotatable, Rotary, Cylindrical, Straight, Dogbone, PVD Coating, Thin Film Deposition, Magnetron SiAl Sputtering Targets Manufacturer and Supplier

Haohai Silicon Aluminum (SiAl) sputtering target with perfect density, high purity and very fine grain microstructure, smooth surface, no cracks, no chipping, no foreign inclusions and contaminants, mainly sputter to coat SiO2 and Si3N4 thin films, which are extensively used in the automotive and architectural glass industry, conductive, scratch and glare resistant glass and video flat panel display glasses.

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Product Details

SiAl Sputtering Target, High Quality, Monolithic, Rotatable, Rotary, Cylindrical, Straight, Dogbone, PVD Coating, Thin Film Deposition, Magnetron SiAl Sputtering Targets Manufacturer and Supplier


SILICON ALUMINUM (SiAl) SPUTTERING TARGET

 

Haohai Silicon Aluminum (SiAl) sputtering target with perfect density, high purity and very fine grain microstructure, smooth surface, no cracks, no chipping, no foreign inclusions and contaminants, mainly sputter to coat SiO2 and Si3N4 thin films, which are extensively used in the automotive and architectural glass industry, conductive, scratch and glare resistant glass and video flat panel display glasses.

 

Haohai Silicon Aluminum (SiAl) Sputtering Targets include Silicon Aluminum (SiAl) rotary sputtering targets

 


 

Silicon Aluminum (SiAl) Rotatable (Rotary, Cylindrical) Sputtering Target

 

Manufacturing Range

OD (mm)ID (mm)Length (mm)Custom Made
80 - 16060 - 125100 - 4000


Specification

CompositionSiAl (90/10 wt%±1%)
Purity3N (99.9%)
Density2.2 g/cm3
Grain Sizes< 200 micron or on request
Fabrication ProcessesPlasma Spraying, Machining
ShapeStraight, Dog bone
End Types

SCI, SRF, DSF, RFF, WFF, VA, GPI Ends Fixation, Spiral Groove, 

Custom Made for SS Backing Tube

SurfaceRa 1.6 micron


Other Specification

 Vapor degreased and demagnetized after final machining.

 ID to be HONED and OD GROUND after raw tube is produced to ensure ID to OD concentricity meets drawing requirements.

 High vacuum tight, leak rate at any location not to exceed 1 x 10-8 STD CC/SEC.

 Sealed in plastic, wrapped in foam to protect, and ends capped to protect seal surfaces.

 


 

For our Silicon Aluminum (SiAl) sputtering targets

 

Tolerance

Acc. to drawings or on request.

 

Impurities Content [ppm]

Silicon Aluminum Content [90/10 wt%]     


SiAl
Purity [%]
99.9
Metallic Impurities [ppm]Ca60
Cu38
Fe200
Ga20
Ti20
Zn70
Non-Metallic Impurities [ppm]O5000
N100
Guaranteed Density [g/cm3]2.2
Grain Size [μm]200


Application

Large Area Glass Coating (Low-E)

Display Industry

 Optical Coating

Solar & Photovoltaic Industry

 



Haohai Metal (Haohai Titanium), equipped with professional factory, is one of the leading manufacturers and suppliers for various materials and sizes of sputtering targets. Our SiAl sputtering target, with high purity, include bonding or spayed (straight or dogbone) rotatable (rotary, cylindrical) targets, planar (rectangle, disc) targets, which are extensiely used in pvd coating for thin film deposition technology. Welcome to buy and wholesale our low price, high usage rates, high purity and high quality SiAl targets.

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