NbOx Sputtering Target, High Quality, Rotatable, Straight, Dogbone, Planar, PVD Coating, Thin Film Deposition, Magnetron NbOx Sputtering Targets Manufacturer and Supplier

Haohai Niobium Oxide (Nb2O5, NbOx) sputtering target with perfect density, high purity and very fine grain microstructure, smooth surface, no cracks, no chipping, no foreign inclusions and contaminants, are extensively used by large area glass coating manufacturing in the architectural glass industry, flat panel display glasses and web coating glasses.

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Product Details

NbOx Sputtering Target, High Quality, Rotatable, Straight, Dogbone, Planar, PVD Coating, Thin Film Deposition, Magnetron NbOx Sputtering Targets Manufacturer and Supplier


NIOBIUM OXIDE SPUTTERING TARGET

 

Haohai Niobium Oxide (Nb2O5, NbOx) sputtering target with perfect density, high purity and very fine grain microstructure, smooth surface, no cracks, no chipping, no foreign inclusions and contaminants, are extensively used by large area glass coating manufacturing in the architectural glass industry, flat panel display glasses and web coating glasses.

 

Haohai Niobium Oxide (Nb2O5, NbOx) Sputtering Targets include Niobium Oxide (Nb2O5, NbOx) rotary sputtering targets and Niobium Oxide (Nb2O5, NbOx) planar sputtering targets.

 



Niobium Oxide (Nb2O5, NbOx) Rotatable (Rotary, Cylindrical) Sputtering Target

 

Manufacturing Range

OD (mm)ID (mm)Length (mm)Custom Made
80 - 16060 - 125100 - 4000


Specification

CompositionNb2O5, Nb2Ox
Purity3N5 (99.95%), 4N (99.99%)
Density4.3 g/cm3
Grain Sizes< 100 micron or on request
Fabrication ProcessesPlasma Spraying, Machining
ShapeStraight, Dog bone
End Types

SCI, SRF, DSF, RFF, WFF, VA, GPI Ends Fixation, Spiral Groove, 

Custom Made for SS Backing Tube

SurfaceRa 1.6 micron

 

Other Specification

 Vapor degreased and demagnetized after final machining.

 ID to be HONED and OD GROUND after raw tube is produced to ensure ID to OD concentricity meets drawing requirements.

 High vacuum tight, leak rate at any location not to exceed 1 x 10-8 STD CC/SEC.

 Sealed in plastic, wrapped in foam to protect, and ends capped to protect seal surfaces.

 


  

Niobium Oxide (Nb2O5, NbOx) Planar (rectangle, circular) Sputtering Target

 

Manufacturing Range

RectangleLength (mm)Width (mm)Thickness (mm)Custom Made
10 - 200010 - 3005.0 - 40
CircularDiameter (mm)
Thickness (mm)
5.0 - 300
5.0 - 40


Specification

CompositionNb2O5, Nb2Ox
Purity3N5 (99.95%), 4N (99.99%)
Density4.3 g/cm3
Grain Sizes< 100 micron or on request
Fabrication ProcessesHIP, Adopt Sintering, Machining, Bonding
ShapeMulti-segmented Target, Bonding on Cu Backing plate
TypesPlate, Disc, Step, Down bolting, Threading, Custom Made
SurfaceRa 1.6 micron


Other Specifications

Flatness, clean smooth surface, polished, free of crack, oil, dot, etc.

Excellent conductions, small linear expansion coefficient and good heat-resistance.

 


 

For our Niobium Oxide (Nb2O5, NbOx) Sputtering Targets

 

Tolerance

Acc. to drawings or on request.

 

Impurities Content [ppm]

Niobium Oxide Content [ppm]
Nb2O5
Purity [%]
> 99.95
Metallic Impurities [ppm]Al10
Ca20
Cr10
Cu20
Fe30
Mo10
Ni10
Sb45
Si150
Ta100
Resistivity [ohm.cm] 20℃< 0.1
Guaranteed Density [g/cm3]4.3
Grain Size [μm]100


Application

Display Industry

 Optical Coating




Haohai Metal (Haohai Titanium), equipped with professional factory, is one of the leading manufacturers and suppliers for various materials and sizes of sputtering targets. Our NbOx sputtering target, with high purity, include bonding or spayed (straight or dogbone) rotatable (rotary, cylindrical) targets, planar (rectangle, disc) targets, which are extensiely used in pvd coating for thin film deposition technology. Welcome to buy and wholesale our low price, high usage rates, high purity and high quality NbOx targets.

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